JPH01118434U - - Google Patents
Info
- Publication number
- JPH01118434U JPH01118434U JP1303388U JP1303388U JPH01118434U JP H01118434 U JPH01118434 U JP H01118434U JP 1303388 U JP1303388 U JP 1303388U JP 1303388 U JP1303388 U JP 1303388U JP H01118434 U JPH01118434 U JP H01118434U
- Authority
- JP
- Japan
- Prior art keywords
- reduced pressure
- pressure cvd
- boat
- quartz tube
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 3
- 239000011521 glass Substances 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1303388U JPH01118434U (en]) | 1988-02-04 | 1988-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1303388U JPH01118434U (en]) | 1988-02-04 | 1988-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118434U true JPH01118434U (en]) | 1989-08-10 |
Family
ID=31222999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1303388U Pending JPH01118434U (en]) | 1988-02-04 | 1988-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118434U (en]) |
-
1988
- 1988-02-04 JP JP1303388U patent/JPH01118434U/ja active Pending